Experimental Verification of the Cluster Effect on Giant Step Bunching on 4H-SiC (0001) Surfaces
2010 ◽
Vol 645-648
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pp. 543-546
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Keyword(s):
In this study, we investigated the cluster effect on the occurrence of giant step bunching. We generated carbon clusters on 4H-SiC (0001) surfaces by thermal decomposition of SiC in an Ar atmosphere and controlled the surface concentrations of the clusters by adding H2 gas. We found the boundaries between surfaces with and without giant steps to show Arrhenius-type behavior. This behavior agreed with our predictions deduced from a chemical reaction model that takes the cluster effect into account, suggesting that giant step bunching is attributable to the formation of clusters on SiC.
2017 ◽
Vol 31
(3)
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pp. 2274-2297
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2014 ◽
Vol 144
(2)
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pp. 427-446
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2016 ◽
Vol 301
◽
pp. 222-232
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2004 ◽
Vol 108
(6)
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pp. 1815-1821
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2003 ◽
Vol 323
◽
pp. 677-685
2007 ◽
Vol 4
(7)
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pp. 1269-1273
Keyword(s):
2007 ◽
Vol 2007
(0)
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pp. _G703-a_
Keyword(s):