Ultra-Thin Flexible Ceramic Membranes for Electronic Applications
2013 ◽
Vol 2013
(1)
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pp. 000379-000383
Keyword(s):
In 2010, ENrG Incorporated commercialized 40 microns thick, flexible zirconia based ceramic membranes as shown in Figure 1. Even though so thin, the membranes are gas-tight, fully dense, strong, thermal shock tolerant and chemically inert. Historically, zirconia membranes are used mainly for applications such as solid oxide fuel cells and oxygen sensors, making use of the ionic property of partially stabilized zirconia at elevated temperatures.
2013 ◽
Vol 38
(22)
◽
pp. 9500-9510
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Keyword(s):
2014 ◽
Vol 271
◽
pp. 538-547
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2011 ◽
Vol 56
(5)
◽
pp. 2230-2236
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Keyword(s):
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2019 ◽
Vol 138
(3)
◽
pp. 2077-2090
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2012 ◽
Vol 38
(8)
◽
pp. 6303-6310
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2010 ◽
Vol 195
(21)
◽
pp. 7160-7167
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1994 ◽
Vol 68
(1-2)
◽
pp. 99-103
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