Structural, Optical, and Electrical Properties of Sputtered Al doped ZnO Thin Film Under Various RF Powers

Jong-Wook Kim; Deok-Kyu Kim; Hong-Bae Kim

doi:10.4313/jkem.2011.24.3.177

Structural, Optical, and Electrical Properties of Sputtered Al doped ZnO Thin Film Under Various RF Powers

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2011.24.3.177 ◽

2011 ◽

Vol 24 (3) ◽

pp. 177-181

Author(s):

Jong-Wook Kim ◽

Deok-Kyu Kim ◽

Hong-Bae Kim

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno

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Structural, Optical and Electrical Properties of Nano-structured Sn-doped ZnO Thin Film via Sol Gel Spin Coating Technique

InCIEC 2014 ◽

10.1007/978-981-287-290-6_82 ◽

2015 ◽

pp. 937-947

Author(s):

I. Saurdi ◽

M. H. Mamat ◽

A. Ishak ◽

M. Rusop

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Spin Coating ◽

Sol Gel ◽

Spin Coating Technique ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Coating Technique ◽

Doped Zno

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Optical and electrical properties of 2wt.% Al2O3-doped ZnO films and characteristics of Al-doped ZnO thin-film transistors with ultra-thin gate insulators

Thin Solid Films ◽

10.1016/j.tsf.2009.08.036 ◽

2010 ◽

Vol 518 (10) ◽

pp. 2808-2811 ◽

Cited By ~ 31

Author(s):

Kyungsoo Jang ◽

Hyeongsik Park ◽

Sungwook Jung ◽

Nguyen Van Duy ◽

Youngkuk Kim ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Zno Films ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Gate Insulators ◽

Doped Zno

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Control the crystal growth of Al-doped ZnO thin film prepared by pulsed laser deposition and the influences on its optical and electrical properties

Journal of Physics Conference Series ◽

10.1088/1742-6596/901/1/012163 ◽

2017 ◽

Vol 901 ◽

pp. 012163 ◽

Cited By ~ 1

Author(s):

N. Khemasiri ◽

S. Jessadaluk ◽

N. Kayunkid ◽

S. Rahong ◽

A. Rangkasikorn ◽

...

Keyword(s):

Thin Film ◽

Crystal Growth ◽

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno

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The optical and electrical properties of gallium-doped ZnO thin film with post-annealing processes of various atmospheres

Microelectronic Engineering ◽

10.1016/j.mee.2015.08.002 ◽

2015 ◽

Vol 148 ◽

pp. 59-63 ◽

Cited By ~ 6

Author(s):

Chien-Sheng Huang ◽

Ching-Chun Liu

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Post Annealing ◽

Doped Zno

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The optical and electrical properties of F doped ZnO thin film by different post-annealing temperatures

Optical and Quantum Electronics ◽

10.1007/s11082-018-1430-3 ◽

2018 ◽

Vol 50 (4) ◽

Cited By ~ 1

Author(s):

Chih Yun Lin ◽

Tao-Hsing Chen ◽

Sheng-Lung Tu ◽

Yun-Hwei Shen ◽

Jia-Ting Huang

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Annealing Temperatures ◽

Post Annealing ◽

Doped Zno

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Li doped ZnO thin film: effect of substrate temperature on structure, optical and electrical properties

Optical and Quantum Electronics ◽

10.1007/s11082-015-0256-5 ◽

2015 ◽

Vol 47 (12) ◽

pp. 3655-3665

Author(s):

Musbah Babikier ◽

Qian Li ◽

Jinzhong Wang ◽

Dunbo Wang ◽

Jianming Sun ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Substrate Temperature ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno

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Impact of rapid thermal annealing on structural, optical and electrical properties of DC sputtered doped and co-doped ZnO thin film

Applied Surface Science ◽

10.1016/j.apsusc.2013.10.048 ◽

2014 ◽

Vol 288 ◽

pp. 411-415 ◽

Cited By ~ 16

Author(s):

Chandan Ashis Gupta ◽

Sutanu Mangal ◽

Udai P. Singh

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno ◽

Co Doped

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8 MeV electron beam induced modifications in the structural, optical and electrical properties of Al doped ZnO thin film

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.09.009 ◽

2016 ◽

Vol 56 ◽

pp. 265-271 ◽

Cited By ~ 11

Author(s):

K.M. Sandeep ◽

Shreesha Bhat ◽

S.M. Dharmaprakash

Keyword(s):

Thin Film ◽

Electron Beam ◽

Electrical Properties ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno

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Surface Characteristics, Optical and Electrical Properties on Sol-Gel Synthesized Sn-Doped ZnO Thin Film

MATERIALS TRANSACTIONS ◽

10.2320/matertrans.m2009378 ◽

2010 ◽

Vol 51 (7) ◽

pp. 1340-1345 ◽

Cited By ~ 44

Author(s):

Kuan Jen Chen ◽

Fei Yi Hung ◽

Yen Ting Chen ◽

Shoou Jinn Chang ◽

Zhan Shuo Hu

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Sol Gel ◽

Surface Characteristics ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno

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Optical and electrical properties of Al doped ZnO thin film with preferred orientation in situ grown at room temperature

Ceramics International ◽

10.1016/j.ceramint.2019.04.149 ◽

2019 ◽

Vol 45 (11) ◽

pp. 14347-14353 ◽

Cited By ~ 5

Author(s):

Hongyan Liu ◽

Xiaoqiang Wang ◽

Mingya Li ◽

Shujin Yu ◽

Rongxu Zheng

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Room Temperature ◽

Preferred Orientation ◽

Optical And Electrical Properties ◽

Zno Thin Film ◽

Doped Zno

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