scholarly journals Micromachining of Fused Silica by KrF Excimer Laser Induced Wet Etching

2002 ◽  
Vol 11 (7) ◽  
pp. 601-607
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Wet Etching ◽  
Krf Excimer Laser

Transient absorption and fluorescence spectroscopy in fused silica induced by pulsed KrF excimer laser irradiation

1991 ◽  
Vol 59 (26) ◽  
pp. 3369-3371 ◽  
Author(s):  
N. Leclerc ◽  
C. Pfleiderer ◽  
J. Wolfrum ◽  
K. Greulich ◽  
W. P. Leung ◽  
...  
Keyword(s):  
Fluorescence Spectroscopy ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Transient Absorption ◽  
Fused Silica ◽  
Absorption And Fluorescence Spectroscopy ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser

High-efficiency refractive index modification of fused silica by F 2 and KrF excimer laser multiwavelength excitation process

2002 ◽  
Author(s):  
Kotaro Obata ◽  
Koji Sugioka ◽  
Toshimitsu Akane ◽  
Koichi Toyoda ◽  
Katsumi Midorikawa
Keyword(s):  
Refractive Index ◽  
Excimer Laser ◽  
High Efficiency ◽  
Fused Silica ◽  
Excitation Process ◽  
Krf Excimer Laser

KrF-excimer-laser-induced absorption and fluorescence bands in fused silica related to the manufacturing process

1990 ◽  
Author(s):  
Norbert Leclerc ◽  
Christoph Pfleiderer ◽  
Hermine Hitzler ◽  
Stephan Thomas ◽  
Ralf Takke ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Manufacturing Process ◽  
Fused Silica ◽  
Induced Absorption ◽  
Krf Excimer Laser

Characterization of fused silica ablation by F 2 -KrF excimer laser multiwavelength excitation process

2002 ◽  
Author(s):  
Kotaro Obata ◽  
Koji Sugioka ◽  
Toshimitsu Akane ◽  
Naoko Aoki ◽  
Koichi Toyoda ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Excitation Process ◽  
Krf Excimer Laser

Effects of glass forming conditions on the KrF-excimer-laser-induced optical damage in synthetic fused silica

1996 ◽  
Vol 203 ◽  
pp. 69-77 ◽  
Author(s):  
D.R. Sempolinski ◽  
T.P. Seward ◽  
C. Smith ◽  
N. Borrelli ◽  
C. Rosplock
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Optical Damage ◽  
Glass Forming ◽  
Krf Excimer Laser

Laser-induced front side etching of fused silica with KrF excimer laser using thin chromium layers

2012 ◽  
Vol 209 (6) ◽  
pp. 1114-1118 ◽  
Author(s):  
Pierre Lorenz ◽  
Martin Ehrhardt ◽  
Klaus Zimmer
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Front Side ◽  
Thin Chromium ◽  
Krf Excimer Laser

KrF-Excimer-Laser Induced Absorption in Synthetic Fused Silica

1997 ◽  
Vol 36 (Part 1, No. 11) ◽  
pp. 6785-6786 ◽  
Author(s):  
Naoyoshi Kamisugi ◽  
Nobu Kuzuu ◽  
Yoshinao Ihara ◽  
Takayuki Nakamura
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Induced Absorption ◽  
Krf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled
Sign in / Sign up

Export Citation Format

Share Document