scholarly journals Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change

2020 ◽  
Author(s):  
Cory R. Knick
Keyword(s):  
Shape Memory Alloy ◽  
Phase Change ◽  
Shape Memory ◽  
Curvature Radius ◽  
Alloy Thin Film ◽  
Individual Layer ◽  
Cantilever Length ◽  
Stress Changes ◽  
Bimorph Actuators ◽  
High Work

At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape memory MEMS bimorph was identified, formulated, and solved. Thicknesses of the SU-8 photoresist and nickel-titanium alloy (NiTi) was identified that yielded maximum deflections and curvature radius based on a relationship among individual layer thicknesses, elastic modulus, and cantilever length. This model should serve as a guideline for optimal NiTi and SU-8 thicknesses to drive large deflections and curvature radius that are most suitable for microrobotic actuation, micromirrors, micropumps, and microgrippers. This model would also be extensible to other phase-change-driven actuators where nonlinear and significant residual stress changes are used to drive actuation.

Extremely high pitting resistance of NiTi shape memory alloy thin film in simulated body fluids

2008 ◽  
Vol 62 (17-18) ◽  
pp. 2791-2794 ◽  
Author(s):  
T. Shahrabi ◽  
S. Sanjabi ◽  
E. Saebnoori ◽  
Z.H. Barber
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Body Fluids ◽  
Niti Shape Memory Alloy ◽  
Alloy Thin Film ◽  
Simulated Body Fluids

RF magnetron sputtered crystalline TiNiCu shape memory alloy thin film

2001 ◽  
Author(s):  
Yongqing Fu ◽  
Xu Huang ◽  
Hejun Du ◽  
Yong Liu
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Thin Film ◽  
Tinicu Shape Memory Alloy

Energetic ion irradiation induced crystallization of Ni–Mn–Sn ferromagnetic shape memory alloy thin film

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 190-196 ◽  
Author(s):  
R. Vishnoi ◽  
R. Singhal ◽  
K. Asokan ◽  
J.C. Pivin ◽  
D. Kanjilal ◽  
...  
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Ion Irradiation ◽  
Alloy Thin Film ◽  
Ferromagnetic Shape Memory Alloy ◽  
Ferromagnetic Shape Memory ◽  
Induced Crystallization

The Response Characteristics of Ni-Ti Shape Memory Alloy Thin Film

2003 ◽  
Vol 2003.41 (0) ◽  
pp. 45-46
Author(s):  
Tomotaka HONDA ◽  
Hitoshi TAKAGI ◽  
Hiroaki MISAWA ◽  
Toyokazu KUBO
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Thin Film ◽  
Response Characteristics

The Response Behavior of Ni-Ti Shape Memory Alloy Thin Film

2003 ◽  
Vol 2003.1 (0) ◽  
pp. 261-262
Author(s):  
Hitoshi TAKAGI ◽  
Tomotaka HONDA ◽  
Hiroaki MISAWA
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Thin Film ◽  
Response Behavior

An Analytical Design Method for a Shape Memory Alloy Wire Actuated Compliant Finger

2008 ◽  
Author(s):  
Chao-Chieh Lan ◽  
You-Nien Yang
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Design Method ◽  
Three Dimensional ◽  
Output Force ◽  
Shape Parameterization ◽  
Robotic Manipulations ◽  
Experimental Validations ◽  
Electro Magnetic ◽  
High Work

This paper presents an analytical method to design a mechanical finger for robotic manipulations. As traditional mechanical fingers require bulky electro-magnetic motors and numerous relative-moving parts to achieve dexterous motion, we propose a class of fingers the manipulation of which relies on finger deflections. These compliant fingers are actuated by shape memory alloy (SMA) wires that exhibit high work-density, frictionless, and quite operations. The combination of compliant members with embedded SMA wires makes the finger more compact and lightweight. Various SMA wire layouts are investigated to improve their response time while maintaining sufficient output force. The mathematical models of finger deflection caused by SMA contraction are then derived along with experimental validations. As finger shapes are essential to the range of deflected motion and output force, we find its optimal initial shapes through the use of a shape parameterization technique. We further illustrate our method by designing a humanoid finger that is capable of three-dimensional manipulation. As compliant fingers can be fabricated monolithically, we expect the proposed method to be utilized for applications of various scales.

Characterization of Ni55.6Mn11.4Fe7.4Ga25.6 high temperature shape memory alloy thin film

2008 ◽  
Vol 465 (1-2) ◽  
pp. 458-461 ◽  
Author(s):  
H.B. Wang ◽  
C. Liu ◽  
Y.C. Lei ◽  
W. Cai
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Thin Film
Sign in / Sign up

Export Citation Format

Share Document