Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition
2000 ◽
Vol 9
(3-6)
◽
pp. 654-657
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1999 ◽
Vol 8
(8-9)
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pp. 1732-1736
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2003 ◽
Vol 42
(Part 1, No. 6A)
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pp. 3598-3602
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1998 ◽
Vol 16
(2)
◽
pp. 572-577
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2000 ◽
Vol 9
(12)
◽
pp. 2024-2030
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2011 ◽
Vol 206
(5)
◽
pp. 1007-1010
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1999 ◽
Vol 17
(1)
◽
pp. 121-124
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2000 ◽
Vol 277
(1-2)
◽
pp. 57-63
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