Deposition of diamond-like carbon films using the screen grid method in electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581560 ◽

1999 ◽

Vol 17 (1) ◽

pp. 121-124 ◽

Author(s):

S. F. Yoon ◽

Rusli ◽

J. Ahn ◽

Q. Zhang ◽

Y. S. Wu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Grid Method ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

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Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00360-5 ◽

2000 ◽

Vol 9 (12) ◽

pp. 2024-2030 ◽

Author(s):

S.F. Yoon ◽

K.H. Tan ◽

J. Rusli ◽

Ahn ◽

Q.F. Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Power ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Dielectric properties of molybdenum-containing diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(02)00049-4 ◽

2002 ◽

Vol 409 (2) ◽

pp. 211-219 ◽

Author(s):

Q.F. Huang ◽

S.F. Yoon ◽

Rusli ◽

Q. Zhang ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Molybdenum-containing carbon films deposited using the screen grid technique in an electron cyclotron resonance chemical vapor deposition system

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00221-6 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 534-538 ◽

Author(s):

Q.F Huang ◽

S.F Yoon ◽

Rusli ◽

H Yang ◽

J Ahn ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Grid Technique ◽

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Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(01)01010-0 ◽

2001 ◽

Vol 392 (1) ◽

pp. 16-21 ◽

Author(s):

B.H Lung ◽

M.J Chiang ◽

M.H Hon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Growth Characterization

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Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.115442 ◽

1995 ◽

Vol 67 (3) ◽

pp. 353-355 ◽

Author(s):

Tohru Inoue ◽

Shigeo Ohshio ◽

Hidetoshi Saitoh ◽

Kiichiro Kamata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Conduction mechanism in molybdenum-containing diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1308102 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4191 ◽

Author(s):

Q. F. Huang ◽

S. F. Yoon ◽

Rusli ◽

H. Yang ◽

B. Gan ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Conduction Mechanism ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Modeling and analysis of hydrogen–methane plasma in electron cyclotron resonance chemical vapor deposition of diamond-like carbon

Journal of Applied Physics ◽

10.1063/1.1421038 ◽

2002 ◽

Vol 91 (1) ◽

pp. 40 ◽

Author(s):

S. F. Yoon ◽

K. H. Tan ◽

Rusli ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Modeling And Analysis

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Hydrogenated amorphous carbon films deposited in an electron cyclotron resonance–chemical vapor deposition discharge reactor using acetylene

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00252-6 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 654-657 ◽

Author(s):

B.K. Kim ◽

T.A. Grotjohn

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous

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Characterization of diamondlike carbon films grown by super‐wide electron‐cyclotron resonance plasma assisted chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579286 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1068-1071 ◽

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon ◽

Resonance Plasma

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Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System

Advanced Tribology ◽

10.1007/978-3-642-03653-8_270 ◽

2009 ◽

pp. 816-819

Author(s):

Guangan Zhang ◽

Liping Wang ◽

Pengxun Yan ◽

Junyan Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Carbon Thin Films

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