Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition
1999 ◽
Vol 8
(8-9)
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pp. 1732-1736
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2000 ◽
Vol 9
(3-6)
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pp. 654-657
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2003 ◽
Vol 42
(Part 1, No. 6A)
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pp. 3598-3602
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2011 ◽
Vol 206
(5)
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pp. 1007-1010
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2000 ◽
Vol 277
(1-2)
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pp. 57-63
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1998 ◽
Vol 16
(2)
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pp. 572-577
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2010 ◽
Vol 204
(18-19)
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pp. 3029-3033
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1994 ◽
Vol 12
(4)
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pp. 1068-1071
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