Sapphire substrate sidewall shaping of deep ultraviolet light-emitting diodes by picosecond laser multiple scribing
2019 ◽
Vol 58
(SC)
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pp. SC1025
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2020 ◽
Vol 13
(10)
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pp. 102005
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2010 ◽
Vol 4
(1-2)
◽
pp. 49-51
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2015 ◽
Vol 85
◽
pp. 59-66
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