The sapphire substrate pretreatment effects on high-temperature annealed AlN templates in deep ultraviolet light emitting diodes
Keyword(s):
Evolution of crystalline quality of AlN via high-temperature (HT) annealing induced by different sapphire pretreatments is investigated.
2019 ◽
Vol 58
(SC)
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pp. SC1025
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2020 ◽
Vol 13
(10)
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pp. 102005
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2010 ◽
Vol 4
(1-2)
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pp. 49-51
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