SiN etching characteristics of Ar/CH3F/O2plasma and dependence on SiN film density

2016 ◽  
Vol 55 (8) ◽  
pp. 086502 ◽  
Author(s):  
Hiroto Ohtake ◽  
Tomiko Wanifuchi ◽  
Masaru Sasaki
Keyword(s):  
1988 ◽  
Vol 150 (5) ◽  
pp. 1200-1201
Author(s):  
P Aliabadi
Keyword(s):  

1994 ◽  
Vol 50 (2) ◽  
pp. 253
Author(s):  
Chiharu Tanabe ◽  
Naoto Mizuno ◽  
Takahiro Fujiwara ◽  
Akihiro Ishikuro ◽  
Kunihiro Yasunaga ◽  
...  

1992 ◽  
Vol 48 (2) ◽  
pp. 229
Author(s):  
Masaaki Kawahara ◽  
Masayuki Hanayama ◽  
Hiromu Miki ◽  
Yoshinori Akai ◽  
Tomohiro Asada

1995 ◽  
Vol 405 ◽  
Author(s):  
W. E. Wallace ◽  
W. L. Wu

AbstractA novel method for determining thin film density by energy dispersive x-ray reflectivity is demonstrated for a polymer-derived spin-on-glass dielectric intended for microelectronics applications. The effects of sample misalignment limit the accuracy of x-ray reflectivity as typically practiced. These effects may be properly accounted for by measuring the critical angle for reflection at many different x-ray wavelengths simultaneously. From this measurement, thin film density can be ascertained with much improved accuracy. The results of the x-ray reflectivity measurement are compared to those derived from MeV ion scattering.


2001 ◽  
Vol 40 (Part 1, No. 2A) ◽  
pp. 916-917 ◽  
Author(s):  
Tsuyoshi Fujimura ◽  
Yukinori Kuroki ◽  
Tohru Hisakado ◽  
Akihiro Ikeda ◽  
Reiji Hattori ◽  
...  

1984 ◽  
Vol 14 (6) ◽  
pp. 803-810 ◽  
Author(s):  
Gordon A. Maclean ◽  
George L. Martin

A procedure is described for estimating timber volume from high-precision measurement of the cross-sectional area of a canopy profile on medium-scale vertical aerial photographs. Timber volume data were obtained from 75 data points in a study area containing several forest types, and canopy profile areas were measured with a stereoplotter at the corresponding points on the aerial photographs. Film density values were also measured along each profile using a scanning microdensitometer. Canopy profile area was found to be independent of the direction of the profile relative to the flight line of the photography. The relation between timber volume and profile area was found to be highly significant, semilogarithmic, and species dependent, with regression R2 values ranging from 0.67 to 0.79. The area under a curve obtained by plotting film density values is not sufficiently correlated with timber volume to be a significant independent variable, either alone or with profile area. However, film density information was found to be of significant value in correcting the profile areas for canopy microopenings too small to be measured with a stereoplotter. With the area of microopenings included as a separate independent variable, regression R2 values range from 0.82 to 0.88.


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