CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure
2018 ◽
Vol 57
(10)
◽
pp. 1002B6
Hiroaki Yamazaki
◽
Yoshihiko Kurui
◽
Tomohiro Saito
◽
Etsuji Ogawa
◽
Kei Obara
◽
...