CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure

2018 ◽  
Vol 57 (10) ◽  
pp. 1002B6
Author(s):  
Hiroaki Yamazaki ◽  
Yoshihiko Kurui ◽  
Tomohiro Saito ◽  
Etsuji Ogawa ◽  
Kei Obara ◽  
...  
Author(s):  
Hiroaki Yamazaki ◽  
Tamio Ikehashi ◽  
Tomohiro Saito ◽  
Etsuji Ogawa ◽  
Takayuki Masunaga ◽  
...  

2007 ◽  
Vol 43 (24) ◽  
pp. 1367 ◽  
Author(s):  
A. Stehle ◽  
C. Siegel ◽  
V. Ziegler ◽  
B. Schönlinner ◽  
U. Prechtel ◽  
...  

2010 ◽  
Vol 130 (6) ◽  
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Author(s):  
Michihiko Nishigaki ◽  
Toshihiko Nagano ◽  
Hiroshi Ono ◽  
Takashi Kawakubo ◽  
Kazuhiko Itaya
Keyword(s):  
Rf Mems ◽  

2021 ◽  
Vol 127 (2) ◽  
Author(s):  
L. Liu ◽  
Y. Zhang ◽  
J. Q. Sheng ◽  
Y. M. Wei ◽  
R. M. Liu ◽  
...  

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