Nondestructive Characterization of Pore Size Distributions in Porous Low-k Films by in-situ Spectroscopic Ellipsometry in Vapor Cell
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1995 ◽
Vol 176
(2)
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pp. 467-478
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2016 ◽
Vol 48
(2)
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pp. 106-114
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2016 ◽
Vol 48
(2)
◽
pp. 106-114
2005 ◽
2000 ◽
Vol 104
(39)
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pp. 9099-9110
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