Characterization of pore sealing effect on trench sidewalls in porous low-k films by vapor adsorption in-situ spectroscopic ellipsometry

2006 ◽  
Author(s):  
N. Hata ◽  
K. Koga ◽  
K. Sumiya ◽  
S. Takada ◽  
M. Tada ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Vapor Adsorption ◽  
Pore Sealing ◽  
Low K

Adsorption in-situ Spectroscopic Ellipsometry Analysis of Disordered Porous Silica Low-k Films

2005 ◽  
Author(s):  
Xianying Li ◽  
Nobutoshi Fujii ◽  
Nobuhiro Hata ◽  
Takamaro Kikkawa
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Porous Silica ◽  
Low K

Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry

2004 ◽  
Author(s):  
Syozo Takada ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
Nobutoshi Fujii ◽  
Takamaro Kikkawa
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Microstructure Characterization ◽  
Infrared Spectroscopic ◽  
Low K

In-situ and ex-situ characterization of GaAs/AlAs quantum well structures using spectroscopic ellipsometry

1992 ◽  
Vol 120 (1-4) ◽  
pp. 78-83 ◽  
Author(s):  
J.L. Edwards ◽  
G.N. Maracas ◽  
K.T. Shiralagi ◽  
K.Y. Choi ◽  
R. Droopad
Keyword(s):  
Quantum Well ◽  
Spectroscopic Ellipsometry ◽  
Ex Situ ◽  
Quantum Well Structures

Characterization of SEI Layers on LiMn[sub 2]O[sub 4] Cathodes with In Situ Spectroscopic Ellipsometry

2005 ◽  
Vol 152 (4) ◽  
pp. A774 ◽  
Author(s):  
Jinglei Lei ◽  
Lingjie Li ◽  
Robert Kostecki ◽  
Rolf Muller ◽  
Frank McLarnon
Keyword(s):  
Spectroscopic Ellipsometry

scholarly journals Characterization of porous low-k films using variable angle spectroscopic ellipsometry

2006 ◽  
Vol 99 (8) ◽  
pp. 083503 ◽  
Author(s):  
M. T. Othman ◽  
J. A. Lubguban ◽  
A. A. Lubguban ◽  
S. Gangopadhyay ◽  
R. D. Miller ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry ◽  
Low K

scholarly journals In-situ spectroscopic ellipsometry for real-time characterization of the effects of high-flux helium plasmas on tungsten surfaces.

2020 ◽  
Author(s):  
Robert Kolasinski ◽  
Chun-Shang Wong ◽  
Josh A. Whaley ◽  
Frances Allen
Keyword(s):  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
High Flux

Characterization of silicon on insulator multilayers using ex situ spectroscopic ellipsometry and in situ monochromatic ellipsometry during plasma etching

1993 ◽  
Vol 233 (1-2) ◽  
pp. 214-217 ◽  
Author(s):  
R. Greef ◽  
D.E. Gray ◽  
N.J. Dartnell ◽  
J. Zhu ◽  
S. Lynch ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Spectroscopic Ellipsometry ◽  
Silicon On Insulator ◽  
Ex Situ

Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films

2008 ◽  
Vol 85 (3) ◽  
pp. 527-533 ◽  
Author(s):  
D. Schmidt ◽  
S. Strehle ◽  
M. Albert ◽  
W. Hentsch ◽  
J.W. Bartha
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry
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