Thermal Stability of the Yttrium Aluminate Film and the Suppression of its structural change and electrical properties degradation
Keyword(s):
1990 ◽
Vol 33
(1)
◽
pp. 79-84
◽
2007 ◽
Vol 173
(2)
◽
pp. 743-747
◽
2001 ◽
Vol 40
(Part 2, No. 1A/B)
◽
pp. L43-L45
◽
2011 ◽
Vol 26
(7)
◽
pp. 075006
◽
Keyword(s):
2015 ◽
Vol 23
(4)
◽
pp. 261-270
◽
Keyword(s):