Information technology (IT) is essential in supporting an organization's business sustainability and growth, making it critically dependent on IT. Therefore, a focus on IT governance, consisting of leadership, organizational structure, and process ensuring that IT organization supports and expands the organizational strategies and goals is required. When the business supports the strategic significance of IT investment, the implementation of an IT strategy will lead to the adoption of an IT governance model. It will support and help the description of the benefit roles and responsibilities from IT systems and infrastructure. This paper aims to develop a business process monitoring system to support IT governance in improving user service and measuring organizational performance. The research method was the system development method with the Waterfall model. To measure the performance of the business process, the self-assessment method with performance matrix tools was applied. The study resulted in a business process monitoring system that can enhance the organization’s primary business process in services, supporting the said organization’s performance.
A Semiconductor Etching Process Monitoring System Development using OES Sensor