lithium phosphate
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Author(s):  
Andreas Werbrouck ◽  
Felix Mattelaer ◽  
Arpan Dhara ◽  
Mikko Nisula ◽  
Matthias Marcus Minjauw ◽  
...  

This work reports on the atomic layer deposition process combining lithium hexamethyl disilazide (LiHMDS) and trimethylphosphate (TMP), and studies the impact of adding a trimethylaluminum (TMA) pulse to this process....


2021 ◽  
Vol 514 ◽  
pp. 230603
Author(s):  
He-Yi Xia ◽  
Xin-Xin Wang ◽  
Guo-Xi Ren ◽  
Wei-Wen Wang ◽  
Yong-Ning Zhou ◽  
...  

2021 ◽  
Vol 569 ◽  
pp. 120944
Author(s):  
Svetlana V. Pershina ◽  
Boris D. Antonov ◽  
Ivan I. Leonidov

Author(s):  
XinLai Wei ◽  
Wen Jie Gao ◽  
Yaoming Wang ◽  
Ke Wu ◽  
Tongwen Xu

Author(s):  
Pichitchai Butnoi ◽  
Wipada Senanon ◽  
Narong Chanlek ◽  
Yingyot Poo-arporn ◽  
Supree Pinitsoontorn ◽  
...  

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