atomic layer deposition process
Recently Published Documents

TOTAL DOCUMENTS

108
(FIVE YEARS 30)

H-INDEX

21
(FIVE YEARS 3)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Surface Reactions Between LiHMDS, TMA and TMP leading to Deposition of Amorphous Lithium Phosphate

2022 ◽  
Author(s):  
Andreas Werbrouck ◽  
Felix Mattelaer ◽  
Arpan Dhara ◽  
Mikko Nisula ◽  
Matthias Marcus Minjauw ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Reactions ◽  
Atomic Layer ◽  
Deposition Process ◽  
Lithium Phosphate ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
The Impact

This work reports on the atomic layer deposition process combining lithium hexamethyl disilazide (LiHMDS) and trimethylphosphate (TMP), and studies the impact of adding a trimethylaluminum (TMA) pulse to this process....

Characterization of radical-enhanced atomic layer deposition process based on microwave surface wave generated plasma

2021 ◽  
Vol 130 (1) ◽  
pp. 013301
Author(s):  
Drahoslav Tvarog ◽  
Jiří Olejníček ◽  
Jiří Kratochvíl ◽  
Petra Kšírová ◽  
Aleš Poruba ◽  
...  
Keyword(s):  
Surface Wave ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

scholarly journals Toolbox for atomic layer deposition process development on high surface area powders

2021 ◽  
Vol 92 (2) ◽  
pp. 025115
Author(s):  
K. Knemeyer ◽  
R. Baumgarten ◽  
P. Ingale ◽  
R. Naumann d’Alnoncourt ◽  
M. Driess ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Area ◽  
Process Development ◽  
High Surface ◽  
High Surface Area ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition
Load More ...
Sign in / Sign up

Export Citation Format

Share Document