Nonlinear distortions, noise, and thermal instability are the most important error sources of non-contact displacement and distance measurement. In this work, the ways of elimination of these errors are considered. Two methods are proposed and analyzed. The first method helps to exclude nonlinear distortions and noise. According to this method, the nonlinear converter is driven to harmonic oscillations orthogonally to the object surface with constant amplitude. Fourier coefficients are calculated for the different node positions of the vibrating converter. Calibration curve of the converter is reconstructed from collections of derivatives, which are obtained solving system of linear equations. The second method uses ratio of the two Fourier coefficients as the informative parameter and helps to exclude thermal instability. In this paper, there is shown that when the method is more noise resistant it is less thermally stable, and vice versa.