Design-Process-Technology Co-optimization for Manufacturability XII
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Published By SPIE

9781510616684, 9781510616691

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Front Matter: Volume 10588

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2324886 ◽

2018 ◽

Keyword(s):

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Applying machine learning to pattern analysis for automated in-design layout optimization

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2299492 ◽

2018 ◽

Author(s):

Jason P. Cain ◽

Moutaz Fakhry ◽

Piyush Pathak ◽

Jason Sweis ◽

Frank Gennari ◽

...

Keyword(s):

Machine Learning ◽

Pattern Analysis ◽

Layout Optimization

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Litho friendly via insertion with in-design auto-fix flow using machine learning

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297499 ◽

2018 ◽

Author(s):

Ahmed Elsemary ◽

Uwe Paul Schroeder ◽

Ahmed Mohyeldin ◽

Janam Bakshi ◽

Mohamed Ismail ◽

...

Keyword(s):

Machine Learning

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Combinational optical rule check on hotspot detection

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297425 ◽

2018 ◽

Author(s):

Shumay Shang ◽

Hongxin Zhang ◽

Rui Wu ◽

Lianghong Yin ◽

Alex Wei ◽

...

Keyword(s):

Hotspot Detection

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Pattern analysis and classification accelerates OPC tuning, monitoring, and optimization and mask inspection

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297097 ◽

2018 ◽

Author(s):

Ruoping Wang ◽

Paul Lupa ◽

Jason Sweis ◽

Ya-Chieh Lai ◽

Philippe Hurat

Keyword(s):

Pattern Analysis ◽

Mask Inspection

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A portable pattern-based design technology co-optimization flow to reduce optical proximity correction run-time

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297077 ◽

2018 ◽

Author(s):

Yi Chieh Chen ◽

Ya-Chieh Lai ◽

Philippe Hurat ◽

Hung-Yu Lin ◽

Tsung-Han Li ◽

...

Keyword(s):

Design Technology ◽

Optical Proximity Correction ◽

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An efficient way of layout processing based on calibre DRC and pattern matching for defects inspection application

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297349 ◽

2018 ◽

Author(s):

Qijian Wan ◽

Helen Li ◽

Robben Li ◽

Tyzy Lee ◽

Teddy Xue ◽

...

Keyword(s):

Pattern Matching ◽

Defects Inspection

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Using pattern based layout comparison for a quick analysis of design changes

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297346 ◽

2018 ◽

Author(s):

Lucas Huang ◽

Huan Kan ◽

Legender Yang ◽

Chunshan Du ◽

Xinyi Hu ◽

...

Keyword(s):

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Hybrid hotspot library building based on optical and geometry analysis at early stage for new node development

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2296834 ◽

2018 ◽

Author(s):

Yayi Wei ◽

Ying Chen ◽

Yajuan Su ◽

Tianyang Gai ◽

Xiaojing Su ◽

...

Keyword(s):

Early Stage ◽

Geometry Analysis ◽

Node Development

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Comparison between multi-colored LEn SADP/SAQP and selective-etching SADP/SAQP

Design-Process-Technology Co-optimization for Manufacturability XII ◽

10.1117/12.2297417 ◽

2018 ◽

Author(s):

Ahmed Hamed ◽

Rehab Kotb Ali ◽

James Word

Keyword(s):

Selective Etching

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