Design-Process-Technology Co-optimization for Manufacturability XII
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Published By SPIE

9781510616684, 9781510616691
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Applying machine learning to pattern analysis for automated in-design layout optimization

2018 ◽  
Author(s):  
Jason P. Cain ◽  
Moutaz Fakhry ◽  
Piyush Pathak ◽  
Jason Sweis ◽  
Frank Gennari ◽  
...  
Keyword(s):  
Machine Learning ◽  
Pattern Analysis ◽  
Layout Optimization

Litho friendly via insertion with in-design auto-fix flow using machine learning

2018 ◽  
Author(s):  
Ahmed Elsemary ◽  
Uwe Paul Schroeder ◽  
Ahmed Mohyeldin ◽  
Janam Bakshi ◽  
Mohamed Ismail ◽  
...  
Keyword(s):  
Machine Learning

Combinational optical rule check on hotspot detection

2018 ◽  
Author(s):  
Shumay Shang ◽  
Hongxin Zhang ◽  
Rui Wu ◽  
Lianghong Yin ◽  
Alex Wei ◽  
...  
Keyword(s):  
Hotspot Detection

Pattern analysis and classification accelerates OPC tuning, monitoring, and optimization and mask inspection

2018 ◽  
Author(s):  
Ruoping Wang ◽  
Paul Lupa ◽  
Jason Sweis ◽  
Ya-Chieh Lai ◽  
Philippe Hurat
Keyword(s):  
Pattern Analysis ◽  
Mask Inspection

A portable pattern-based design technology co-optimization flow to reduce optical proximity correction run-time

2018 ◽  
Author(s):  
Yi Chieh Chen ◽  
Ya-Chieh Lai ◽  
Philippe Hurat ◽  
Hung-Yu Lin ◽  
Tsung-Han Li ◽  
...  
Keyword(s):  
Design Technology ◽  
Optical Proximity Correction ◽  
Run Time

An efficient way of layout processing based on calibre DRC and pattern matching for defects inspection application

2018 ◽  
Author(s):  
Qijian Wan ◽  
Helen Li ◽  
Robben Li ◽  
Tyzy Lee ◽  
Teddy Xue ◽  
...  
Keyword(s):  
Pattern Matching ◽  
Defects Inspection

Using pattern based layout comparison for a quick analysis of design changes

2018 ◽  
Author(s):  
Lucas Huang ◽  
Huan Kan ◽  
Legender Yang ◽  
Chunshan Du ◽  
Xinyi Hu ◽  
...  
Keyword(s):  
Design Changes

Hybrid hotspot library building based on optical and geometry analysis at early stage for new node development

2018 ◽  
Author(s):  
Yayi Wei ◽  
Ying Chen ◽  
Yajuan Su ◽  
Tianyang Gai ◽  
Xiaojing Su ◽  
...  
Keyword(s):  
Early Stage ◽  
Geometry Analysis ◽  
Node Development

Comparison between multi-colored LEn SADP/SAQP and selective-etching SADP/SAQP

2018 ◽  
Author(s):  
Ahmed Hamed ◽  
Rehab Kotb Ali ◽  
James Word
Keyword(s):  
Selective Etching
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