Tribology Issues and Opportunities in MEMS
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Published By Springer Netherlands

9789401061216, 9789401150507
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Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications

1998 ◽  
pp. 579-589 ◽  
Author(s):  
Z. Rymuza ◽  
Z. Kusznierewicz ◽  
M. Misiak ◽  
K. Schmidt-Szałowski ◽  
Z. Rżanek-Boroch ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Silicon Oxide

Tribological Properties of Modified MEMS Surfaces

1998 ◽  
pp. 607-614 ◽  
Author(s):  
V. V. Tsukruk ◽  
T. Nguyen ◽  
M. Lemieux ◽  
J. Hazel ◽  
W. H. Weber ◽  
...  
Keyword(s):  
Tribological Properties

Statistical Thermodynamic Treatment of the AFM Tip in Liquid

1998 ◽  
pp. 313-323
Author(s):  
Kenichiro Koga ◽  
X. C. Zeng ◽  
Dennis J. Diestler
Keyword(s):  
Statistical Thermodynamic

The Tribology of Hydrocarbon Surfaces Investigated using Molecular Dynamics

1998 ◽  
pp. 285-299 ◽  
Author(s):  
Judith A. Harrison ◽  
Steven J. Stuart ◽  
Martin D. Perry
Keyword(s):  
Molecular Dynamics
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