Tribology Issues and Opportunities in MEMS
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Published By Springer Netherlands

9789401061216, 9789401150507
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications

1998 ◽  
pp. 579-589 ◽  
Author(s):  
Z. Rymuza ◽  
Z. Kusznierewicz ◽  
M. Misiak ◽  
K. Schmidt-Szałowski ◽  
Z. Rżanek-Boroch ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Silicon Oxide

Microfabrication Technologies for High Performance Microactuators

1998 ◽  
pp. 53-72 ◽  
Author(s):  
F. Michel ◽  
W. Ehrfeld
Keyword(s):  
High Performance

Metrology for MEMS Tribology

1998 ◽  
pp. 481-486
Author(s):  
Norm V. Gitis

Mechanics of Wear: From Conventional Components to MEMS

1998 ◽  
pp. 165-174
Author(s):  
F. J. Franklin ◽  
A. Kapoor

Tribological Properties of Modified MEMS Surfaces

1998 ◽  
pp. 607-614 ◽  
Author(s):  
V. V. Tsukruk ◽  
T. Nguyen ◽  
M. Lemieux ◽  
J. Hazel ◽  
W. H. Weber ◽  
...  
Keyword(s):  
Tribological Properties

Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors

1998 ◽  
pp. 403-406
Author(s):  
K. C. Stark ◽  
M. Mehregany ◽  
S. M. Phillips
Keyword(s):  
Gear Tooth ◽  
Outer Rotor

Statistical Thermodynamic Treatment of the AFM Tip in Liquid

1998 ◽  
pp. 313-323
Author(s):  
Kenichiro Koga ◽  
X. C. Zeng ◽  
Dennis J. Diestler
Keyword(s):  
Statistical Thermodynamic

The Tribology of Hydrocarbon Surfaces Investigated using Molecular Dynamics

1998 ◽  
pp. 285-299 ◽  
Author(s):  
Judith A. Harrison ◽  
Steven J. Stuart ◽  
Martin D. Perry
Keyword(s):  
Molecular Dynamics
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