Tribology Issues and Opportunities in MEMS
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Published By Springer Netherlands

9789401061216, 9789401150507
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications

1998 ◽  
pp. 579-589 ◽  
Author(s):  
Z. Rymuza ◽  
Z. Kusznierewicz ◽  
M. Misiak ◽  
K. Schmidt-Szałowski ◽  
Z. Rżanek-Boroch ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Silicon Oxide

Biosensors and Microfluidic Systems

1998 ◽  
pp. 85-94 ◽  
Author(s):  
P. J. Hesketh ◽  
S. Zivanovic ◽  
S. Pak ◽  
B. Ilic ◽  
L. St. Clair ◽  
...  
Keyword(s):  
Microfluidic Systems

Tribological Properties of Modified MEMS Surfaces

1998 ◽  
pp. 607-614 ◽  
Author(s):  
V. V. Tsukruk ◽  
T. Nguyen ◽  
M. Lemieux ◽  
J. Hazel ◽  
W. H. Weber ◽  
...  
Keyword(s):  
Tribological Properties
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