Optical Interference Coatings
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Study of the growth and interface engineering of dense/porous SiN_x optical coatings by real-time spectroscopic ellipsometry

2004 ◽  
Author(s):  
Aram Amassian ◽  
Richard Vernhes ◽  
Jolanta Klemberg-Sapieha ◽  
Patrick Desjardins ◽  
Ludvik Martinu
Keyword(s):  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Optical Coatings ◽  
Interface Engineering

Light intensification by nodular defects in multilayer coatings

2004 ◽  
Author(s):  
Christopher Stolz ◽  
François Y. Génin ◽  
Thomas V. Pistor
Keyword(s):  
Multilayer Coatings ◽  
Light Intensification

Room-temperature crystallization of amorphous thin films by RF plasma treatment

2004 ◽  
Author(s):  
Hisashi Ohsaki ◽  
Y. Shibayama ◽  
A. Kinbara ◽  
T. Watanabe ◽  
K. Fukuhisa ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Room Temperature ◽  
Rf Plasma ◽  
Amorphous Thin Films ◽  
Temperature Crystallization

Optical coatings for the 157 nm full-field exposure tool FS1

2004 ◽  
Author(s):  
Minoru Otani ◽  
T. Itho ◽  
S. Kuwabara ◽  
R. Biro ◽  
H Fukushima ◽  
...  
Keyword(s):  
Optical Coatings ◽  
Field Exposure ◽  
Full Field

Microstructure related properties at 193nm of MgF_2 and GdF_3 films deposited by resistive heating boat

2004 ◽  
Author(s):  
Ming-Chung Liu ◽  
Cheng-Chung Lee ◽  
Masaaki Kaneko ◽  
Kazuhide Nakahira ◽  
Yuuichi Takano
Keyword(s):  
Resistive Heating
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