Optical Inspection of Microsystems
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Published By CRC Press

9780429186738
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Grid and Moiré Methods for Micromeasurements

2019 ◽  
pp. 207-243
Author(s):  
Anand Asundi ◽  
Bing Zhao ◽  
Huimin Xie

Optical Profiling Techniques for MEMS Measurement

2019 ◽  
pp. 177-206
Author(s):  
Klaus Körner ◽  
Johann Krauter ◽  
Aiko Ruprecht ◽  
Tobias Wiesendanger
Keyword(s):  
Profiling Techniques

A Metrological Characteristics Approach to Uncertainty in Surface Metrology

2019 ◽  
pp. 73-91
Author(s):  
Richard Leach ◽  
Han Haitjema ◽  
Claudiu Giusca
Keyword(s):  
Metrological Characteristics ◽  
Surface Metrology

An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS

2019 ◽  
pp. 349-378
Author(s):  
Christophe Gorecki ◽  
Michał Józwik ◽  
Patrick Delobelle
Keyword(s):  
Dynamic Evaluation ◽  
Out Of Plane ◽  
Plane Deformations

Sensor Fusion in Multiscale Inspection Systems

2019 ◽  
pp. 541-561
Author(s):  
Marc Gronle
Keyword(s):  
Sensor Fusion ◽  
Inspection Systems

Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)

2019 ◽  
pp. 155-176
Author(s):  
F. Michael Serry ◽  
Joanna Schmit
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force

Spectroscopic Techniques for MEMS Inspection

2019 ◽  
pp. 517-539
Author(s):  
Ingrid De Wolf
Keyword(s):  
Spectroscopic Techniques

Speckle Metrology for Microsystem Inspection

2019 ◽  
pp. 485-515
Author(s):  
Roland Höfling ◽  
Petra Aswendt
Keyword(s):  
Speckle Metrology

Digital Holography and Its Application in MEMS/MOEMS Inspection

2019 ◽  
pp. 405-484
Author(s):  
Wolfgang Osten ◽  
Pietro Ferraro
Keyword(s):  
Digital Holography
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