2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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Photonic Properties of Silicon-on-Glass Nano-Films and its Fabrication

2006 ◽  
Author(s):  
Simiao Xiao ◽  
Guangbo Li ◽  
Fan Wang ◽  
Xiaoqing Jiang ◽  
Minghua Wang ◽  
...  

A Novel Micro Thermal Shear Stress Sensor with a Cavity underneath

2006 ◽  
Author(s):  
Shali Shi ◽  
Dapeng Chen ◽  
Honglei Bai ◽  
Deyong Ding ◽  
Yi Ou ◽  
...  
Keyword(s):  
Shear Stress ◽  
Stress Sensor ◽  
Shear Stress Sensor

Design Principle of Suspension of MEMS Gyroscope

2006 ◽  
Author(s):  
Qin Shi ◽  
Shourong Wang ◽  
Anping Qiu ◽  
Yishen Xu ◽  
Xunsheng Ji
Keyword(s):  
Design Principle ◽  
Mems Gyroscope

Non-Silicon MEMS Calorimetric Gas Flow Sensor

2006 ◽  
Author(s):  
Xuanyi Duan ◽  
Xin Fu ◽  
Haibo Xie ◽  
Huayong Yang
Keyword(s):  
Gas Flow ◽  
Flow Sensor
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