Analysis of frequency response sensor of MEMS gyroscope in vacuum chamber

This article presents a study of the frequency response of a MEMS gyroscope in a vacuum chamber. On the basis of experimental studies by the method of laser Doppler vibrometry, the dependences of the amplitude of oscillations of the inertial mass in the vertical plane at various pressures are obtained. The bandwidth of the MEMS sensor was also measured.As a result of the experiments, the damping factors were determined to compose a more complete mathematical model and for more accurate finite element modeling in ANSYS, and refined parameters of the electrostatic drive and the amplitude of oscillations along the axis of the drive were obtained. These studies will be useful for determining the residual degree of vacuum in the case for further frequency tuning of the device.