Particles on Surfaces 1
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28

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6

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Published By Springer US

9781461595335, 9781461595311

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Implications of Particulate Contamination in the Performance of Floppy Disks

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_9 ◽

1988 ◽

pp. 113-125

Author(s):

A. F. Lewis ◽

R. J. Rogers

Keyword(s):

Particulate Contamination

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Electric Field Detachment of Charged Particles

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_27 ◽

1988 ◽

pp. 351-360 ◽

Cited By ~ 6

Author(s):

Dan A. Hays

Keyword(s):

Electric Field ◽

Charged Particles

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Automated SEM/EDS Image Analysis of Particles on Filter Blanks

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_23 ◽

1988 ◽

pp. 293-306 ◽

Cited By ~ 2

Author(s):

Garvin J. Stone

Keyword(s):

Image Analysis

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Cleaning Semiconductor Surfaces: Facts and Foibles

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_2 ◽

1988 ◽

pp. 17-35 ◽

Cited By ~ 2

Author(s):

Arvind Khilnani

Keyword(s):

Semiconductor Surfaces

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Measuring Aerosol Particle Concentration in Clean Rooms and Particle areal Density on Silicon Wafer Surfaces

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_4 ◽

1988 ◽

pp. 43-56

Author(s):

R. P. Donovan ◽

B. R. Locke ◽

D. S. Ensor

Keyword(s):

Silicon Wafer ◽

Aerosol Particle ◽

Particle Concentration ◽

Areal Density ◽

Wafer Surfaces

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A New Approach to the Removal of Sub-Micron Particles from Solid (Silicon) Substrates

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_28 ◽

1988 ◽

pp. 361-372 ◽

Cited By ~ 15

Author(s):

A. F. M. Leenaars

Keyword(s):

Silicon Substrates ◽

New Approach

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Contamination of Chip Surfaces by Particles During Destructive Physical Analysis of Integrated Circuit Devices

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_6 ◽

1988 ◽

pp. 69-76

Author(s):

J. J. Weimer ◽

J. Kokosinski ◽

M. R. Cook ◽

M. Grunze

Keyword(s):

Integrated Circuit ◽

Physical Analysis

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Effect of Chemical Cleaning Sequencing on Particle Addition/Reduction on Silicon Wafers

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_3 ◽

1988 ◽

pp. 37-42 ◽

Cited By ~ 1

Author(s):

Charlie A. Peterson

Keyword(s):

Silicon Wafers ◽

Chemical Cleaning ◽

Particle Addition

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Detection of Particles Down to a “Few” Micrometers on Non-Specular Microelectronic Substrates and Other Surfaces

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_21 ◽

1988 ◽

pp. 253-267

Author(s):

Clarence Smith ◽

Ted Ross

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Toner Adhesion in Electrophotography

Particles on Surfaces 1 ◽

10.1007/978-1-4615-9531-1_13 ◽

1988 ◽

pp. 169-177 ◽

Cited By ~ 13

Author(s):

M. H. Lee ◽

A. B. Jaffe

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