Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003.
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Thermal and mechanical simulation of bulk resonators

2004 ◽  
Author(s):  
M. Morata ◽  
E. Figueras ◽  
I. Gracia ◽  
L. Fonseca ◽  
C. Cane
Keyword(s):  
Mechanical Simulation

Capacitive humidity sensor using a polyimide sensing film

2004 ◽  
Author(s):  
J. Laconte ◽  
V. Wilmart ◽  
J.-P. Raskin ◽  
D. Flandre
Keyword(s):  
Humidity Sensor ◽  
Capacitive Humidity Sensor

Model-based optimization of medical test strips

2004 ◽  
Author(s):  
O. Nussen ◽  
D. Peters ◽  
H. Bolte ◽  
R. Laur
Keyword(s):  
Medical Test ◽  
Test Strips ◽  
Model Based

SU8 resist plasma etching and its optimisation

2004 ◽  
Author(s):  
Guodong Hong ◽  
A.S. Holmes ◽  
M.E. Heaton
Keyword(s):  
Plasma Etching

Evaluation of principal characteristics of circular resonator in thin film applications

2004 ◽  
Author(s):  
S. Myllymaki ◽  
E. Ristolainen ◽  
P. Heino ◽  
A. Lehto ◽  
K. Varjonen
Keyword(s):  
Thin Film ◽  
Principal Characteristics

Soldered sealing process to assemble a protective cap for a MEMS CSP

2004 ◽  
Author(s):  
E. Jung ◽  
A. Ostmann ◽  
M. Wiemer ◽  
I. Kolesnik ◽  
M. Rutter

A new methodology for modeling MEMS structures

2004 ◽  
Author(s):  
Kaiping Zeng ◽  
Zhenyu Liu ◽  
J.G. Korvink

Behavioral modeling and simulation of micromechanical resonator for communications applications

2004 ◽  
Author(s):  
C. Mandelbaum ◽  
S. Cases ◽  
D. Bensaude ◽  
L. Basteres ◽  
P. Nachtergaele
Keyword(s):  
Modeling And Simulation ◽  
Behavioral Modeling
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