Journal of Microelectromechanical Systems
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4076
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Published By Institute Of Electrical And Electronics Engineers

1941-0158, 1057-7157
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

scholarly journals Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory

2022 ◽  
pp. 1-9
Author(s):  
Dinesh Pamunuwa ◽  
Elliott Worsey ◽  
Jamie D. Reynolds ◽  
Derek Seward ◽  
Harold M. H. Chong ◽  
...  
Keyword(s):  
Non Volatile Memory ◽  
Volatile Memory

scholarly journals Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

2022 ◽  
pp. 1-13
Author(s):  
James M. L. Miller ◽  
Gabrielle D. Vukasin ◽  
Ze Zhang ◽  
Hyun-Keun Kwon ◽  
Arun Majumdar ◽  
...  
Keyword(s):  
Boundary Conditions ◽  
Micromechanical Resonators

Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts

2022 ◽  
pp. 1-10
Author(s):  
Ethan Falicov ◽  
Jessica Marvin ◽  
Zhixin Alice Ye ◽  
Sergio Fabian Almeida ◽  
Daniel S. Contreras ◽  
...  
Keyword(s):  
Tungsten Oxide ◽  
Oxide Films

Triple Mass Resonator for Electrostatic Quality Factor Tuning

2022 ◽  
pp. 1-10
Author(s):  
Jianlin Chen ◽  
Takashiro Tsukamoto ◽  
Shuji Tanaka
Keyword(s):  
Quality Factor

SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers

2022 ◽  
pp. 1-8
Author(s):  
Junyao Shen ◽  
Sulei Fu ◽  
Rongxuan Su ◽  
Huiping Xu ◽  
Zengtian Lu ◽  
...  
Keyword(s):  
High Power ◽  
Temperature Stability ◽  
Power Handling
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