Triple Mass Resonator for Electrostatic Quality Factor Tuning

Author(s):  
Jianlin Chen ◽  
Takashiro Tsukamoto ◽  
Shuji Tanaka
Keyword(s):  
1988 ◽  
Vol 49 (C8) ◽  
pp. C8-1947-C8-1948
Author(s):  
J. Miltat ◽  
P. Trouilloud

2014 ◽  
Vol 134 (2) ◽  
pp. 26-31 ◽  
Author(s):  
Nguyen Van Toan ◽  
Masaya Toda ◽  
Yusuke Kawai ◽  
Takahito Ono

2010 ◽  
Vol 93 (2) ◽  
pp. 334-337 ◽  
Author(s):  
Sae Han Na Doo ◽  
Yeon Hwa Jo ◽  
Joon Seok Lee ◽  
Bhaskar C. Mohanty ◽  
Koppole C. Sekhar ◽  
...  
Keyword(s):  

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
J. P. Vasco ◽  
V. Savona

AbstractWe optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of $$Q_c=4.33\times 10^7$$ Q c = 4.33 × 10 7 , which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.


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