JMEMS Letters Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles
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2013 ◽
Vol 64
(12)
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pp. 659-661
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2010 ◽
Vol 27
(12)
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pp. 2568
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2005 ◽
Vol 44
(No. 30)
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pp. L973-L975
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