Statistical Case Studies for Industrial Process Improvement
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Published By Society For Industrial And Applied Mathematics

9780898713947, 9780898719765
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

19. Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates

1997 ◽  
pp. 265-281
Author(s):  
Fred Preuninger ◽  
Joseph Blasko ◽  
Steven Meester ◽  
Taeho Kook
Keyword(s):  
Experimental Design ◽  
Polycrystalline Silicon

27. Experimentation for Equipment Reliability Improvement

1997 ◽  
pp. 387-401 ◽  
Author(s):  
Donald K. Lewis ◽  
Craig Hutchens ◽  
Joseph M. Smith
Keyword(s):  
Reliability Improvement ◽  
Equipment Reliability

9. Identifying Sources of Variation in a Wafer Planarization Process

1997 ◽  
pp. 105-114 ◽  
Author(s):  
Arnon M. Hurwitz ◽  
Patrick D. Spagon
Keyword(s):  
Sources Of Variation ◽  
Planarization Process

7. Understanding the Nature of Variability in a Dry Etch Process

1997 ◽  
pp. 71-85
Author(s):  
Richard O. Lynch ◽  
Richard J. Markle
Keyword(s):  
Dry Etch

6. Introduction to Passive Data Collection

1997 ◽  
pp. 63-69 ◽  
Author(s):  
Veronica Czitrom
Keyword(s):  
Data Collection ◽  
Passive Data

16. Modeling a Uniformity Bulls-Eye Inversion

1997 ◽  
pp. 213-234 ◽  
Author(s):  
James Buckner ◽  
Richard Huang ◽  
Kenneth A. Monnig ◽  
Eliot K. Broadbent ◽  
Barry L. Chin ◽  
...  

12. Sampling to Meet a Variance Specification: Clean Room Qualification

1997 ◽  
pp. 145-154
Author(s):  
Kathryn Hall ◽  
Steven Carpenter
Keyword(s):  
Clean Room

8. Virgin versus Recycled Wafers for Furnace Qualification: Is the Expense Justified?

1997 ◽  
pp. 87-104 ◽  
Author(s):  
Veronica Czitrom ◽  
Jack E. Reece
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