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International Congress on Applications of Lasers & Electro-Optics
Latest Publications
TOTAL DOCUMENTS
12
(FIVE YEARS 0)
H-INDEX
1
(FIVE YEARS 0)
Published By Laser Institute Of America
9780912035024
Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
Related Keywords
Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
Related Keywords
Optical measurement of liquid film thickness
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057314
◽
1982
◽
Cited By ~ 1
Author(s):
Randal L. Schmitt
◽
Warren H. Stevenson
◽
Harold C. Simmons
Keyword(s):
Film Thickness
◽
Liquid Film
◽
Optical Measurement
◽
Liquid Film Thickness
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Resonant ATR spectroscopy in semiconductor technology
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057321
◽
1982
◽
Author(s):
Bruno Bosacchi
◽
Robert C. Oehrle
Keyword(s):
Semiconductor Technology
◽
Atr Spectroscopy
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Automatic sub-micron mask and reticle inspection
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057320
◽
1982
◽
Author(s):
John Mathews
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A scanning laser microscope for in-process inspection of semiconductor wafers
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057318
◽
1982
◽
Author(s):
R. L. Schmitt
◽
R. W. Heebner
Keyword(s):
Scanning Laser
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Integrated optical devices for temperature sensing
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057316
◽
1982
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Author(s):
L. M. Johnson
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F. J. Leonberger
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G. W. Pratt
Keyword(s):
Optical Devices
◽
Temperature Sensing
◽
Integrated Optical
◽
Integrated Optical Devices
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Laser micrometrology for integrated circuits
International Congress on Applications of Lasers & Electro-Optics
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10.2351/1.5057313
◽
1982
◽
Author(s):
D. Nyyssonen
Keyword(s):
Integrated Circuits
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An automated electro-optical comparator system
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057310
◽
1982
◽
Author(s):
Burton D. Figler
◽
John P. Fallon
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Precision laser micro-machining for semiconductors
International Congress on Applications of Lasers & Electro-Optics
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10.2351/1.5057319
◽
1982
◽
Author(s):
E. G. Arthurs
Keyword(s):
Micro Machining
◽
Laser Micro Machining
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Phase- and intensity-modulated fiberoptic sensors
International Congress on Applications of Lasers & Electro-Optics
◽
10.2351/1.5057315
◽
1982
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Author(s):
Charles M. Davis
Keyword(s):
Intensity Modulated
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Machine vision and quality control
International Congress on Applications of Lasers & Electro-Optics
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10.2351/1.5057312
◽
1982
◽
Author(s):
Nello Zuech
Keyword(s):
Quality Control
◽
Machine Vision
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