For confirming the feasibility of micrometer scale analysis of lithium distribution in the all-solid-state lithium battery using a sulfide-based solid electrolyte, the cross-section of pellet type battery was analyzed by microbeam particle-induced X-ray emission (PIXE) and particle-induced gamma-ray emission (PIGE) measurements. A three-layered pellet-type battery (cathode: LiNbO3-coated [Formula: see text]/solid electrolyte: [Formula: see text]/anode: [Formula: see text]) was prepared for the measurements. Via elemental mapping of the cross-section of the prepared battery, the difference in the yields of gamma rays from the [Formula: see text] inelastic scattering (i.e., the lithium concentrations) between the composite electrodes and the solid electrolyte layer was clarified. The difference in the number of lithium ions at the composite anode/solid electrolyte interface of ([Formula: see text] mol) in the battery can be clearly detected by the microbeam PIGE technique. Therefore, lithium distribution analysis with a micrometer-scale spatial resolution is demonstrated. Further analysis of the cathode/anode composite electrodes with the different states of charge could provide important information to design a composite for high-performance all-solid-state lithium batteries.