Heat treatment induced structural and optical properties of rf magnetron sputtered tantalum oxide films

2007 ◽  
Vol 42 (3) ◽  
pp. 290-294 ◽  
Author(s):  
S. V. Jagadeesh Chandra ◽  
G. Mohan Rao ◽  
S. Uthanna
Keyword(s):  
Heat Treatment ◽  
Optical Properties ◽  
Tantalum Oxide ◽  
Oxide Films ◽  
Structural And Optical Properties

Influence of annealing on the structural and optical properties of gallium oxide films deposited on c-sapphire substrate

Vacuum ◽  
2019 ◽  
Vol 167 ◽  
pp. 6-9 ◽  
Author(s):  
Jianwen Wu ◽  
Wei Mi ◽  
Zhengchun Yang ◽  
Yuting Chen ◽  
Peijun Li ◽  
...  
Keyword(s):  
Optical Properties ◽  
Sapphire Substrate ◽  
Gallium Oxide ◽  
Oxide Films ◽  
Structural And Optical Properties

Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

2002 ◽  
Vol 92 (7) ◽  
pp. 3599-3607 ◽  
Author(s):  
S. Venkataraj ◽  
Oliver Kappertz ◽  
Hansjörg Weis ◽  
Robert Drese ◽  
R. Jayavel ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Zirconium Oxide ◽  
Oxide Films ◽  
Structural And Optical Properties ◽  
Direct Current Magnetron Sputtering
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