Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.1503858 ◽

2002 ◽

Vol 92 (7) ◽

pp. 3599-3607 ◽

Author(s):

S. Venkataraj ◽

Oliver Kappertz ◽

Hansjörg Weis ◽

Robert Drese ◽

R. Jayavel ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Zirconium Oxide ◽

Oxide Films ◽

Structural And Optical Properties ◽

Direct Current Magnetron Sputtering

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Structural and optical properties of thin lead oxide films produced by reactive direct current magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1410948 ◽

2001 ◽

Vol 19 (6) ◽

pp. 2870 ◽

Author(s):

S. Venkataraj ◽

Jean Geurts ◽

Hansjörg Weis ◽

Oliver Kappertz ◽

Walter K. Njoroge ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Oxide Films ◽

Structural And Optical Properties ◽

Direct Current Magnetron Sputtering

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Electrical and optical properties of thin Ta and W oxide films produced by reactive direct current magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574493 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1775-1777 ◽

Author(s):

B. P. Hichwa ◽

G. Caskey ◽

D. F. Betz ◽

J. D. Harlow

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Direct Current Magnetron Sputtering

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Effect of moving speed during in-line pulsed direct-current magnetron sputtering deposition on the structural and optical properties of Al-doped ZnO films

Thin Solid Films ◽

10.1016/j.tsf.2017.07.014 ◽

2017 ◽

Vol 638 ◽

pp. 144-152 ◽

Author(s):

Sung Yong Kim ◽

Eou-Sik Cho ◽

Sang Jik Kwon

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Zno Films ◽

Structural And Optical Properties ◽

Sputtering Deposition ◽

Direct Current Magnetron Sputtering ◽

Doped Zno ◽

Pulsed Direct Current ◽

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Optical properties of aluminum nitride thin films grown by direct-current magnetron sputtering close to epitaxy

Thin Solid Films ◽

10.1016/j.tsf.2013.01.086 ◽

2013 ◽

Vol 534 ◽

pp. 442-445 ◽

Author(s):

A. Stolz ◽

A. Soltani ◽

B. Abdallah ◽

J. Charrier ◽

D. Deresmes ◽

...

Keyword(s):

Optical Properties ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering

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Successive deposition of layered titanium oxide/indium tin oxide films on unheated substrates by twin direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2005.11.035 ◽

2006 ◽

Vol 500 (1-2) ◽

pp. 110-116 ◽

Author(s):

Kee-Rong Wu ◽

Chieh-Hung Ting ◽

Wu-Chien Liu ◽

Chao-Hsien Lin ◽

Jiing-Kae Wu

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Direct Current ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Direct Current Magnetron Sputtering ◽

Tin Oxide Films

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Microstructure and Optical Properties of Ag x O Prepared by Direct-Current Magnetron-Sputtering Method

Chinese Physics Letters ◽

10.1088/0256-307x/25/4/077 ◽

2008 ◽

Vol 25 (4) ◽

pp. 1449-1452 ◽

Author(s):

Gao Xiao-Yong ◽

Liu Xu-Wei ◽

Wang Song-You ◽

Liu Yu-Fen ◽

Lin Qing-Geng ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering

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Fluorine-doped tin oxide films grown by pulsed direct current magnetron sputtering with an Sn target

Applied Optics ◽

10.1364/ao.50.00c106 ◽

2010 ◽

Vol 50 (9) ◽

pp. C106 ◽

Author(s):

Bo-Huei Liao ◽

Chien-Cheng Kuo ◽

Pin-Jen Chen ◽

Cheng-Chung Lee

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Tin Oxide ◽

Oxide Films ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current ◽

Tin Oxide Films

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Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering

Chinese Physics B ◽

10.1088/1674-1056/20/2/026103 ◽

2011 ◽

Vol 20 (2) ◽

pp. 026103 ◽

Author(s):

Xiao-Yong Gao ◽

Zeng-Yuan Zhang ◽

Jiao-Min Ma ◽

Jing-Xiao Lu ◽

Jin-Hua Gu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Crystalline Structure ◽

Direct Current ◽

Silver Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Sputtering Power

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Tailoring the structural and optical properties of bismuth oxide films deposited by reactive magnetron sputtering for photocatalytic application

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2019.122580 ◽

2020 ◽

Vol 243 ◽

pp. 122580

Author(s):

Sara Ibrahim ◽

Pierre Bonnet ◽

Mohamed Sarakha ◽

Christophe Caperaa ◽

Guillaume Monier ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Bismuth Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Photocatalytic Application

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Structure and optical properties of CdS nanoscale thin films obtained by direct current magnetron sputtering

2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP) ◽

10.1109/nap.2017.8190242 ◽

2017 ◽

Author(s):

Galina I. Kopach ◽

Ruslan P. Mygushchenko ◽

Gennadiy S. Khrypunov ◽

Andrey I. Dobrozhan ◽

Mykola M. Harchenko

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering

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