Ternary compound Ti4ZrSi3 was prepared by arc melting using a non-consumable tungsten electrode under argon atmosphere, then annealed at 1023K for 30 days, the X-ray powder diffraction data of Ti4ZrSi3 was collected on a Rigaku SmartLab X-ray powder diffractometer. The powder patterns of the compound were indexed and structure refinement by using Rietveld method indicate that the Ti4ZrSi3 compound crystallizes in the hexagonal structure, space group P6/mcm (No.193) with Mn5Si3 structure type, a=b=7.5759(3) Ǻ, c=5.2162(2) Ǻ, V=259.28Ǻ3, Z=2, ρx=4.779g cm-3, the Smith–Snyder FOM F30=148.7(0.0064, 46) and the intensity ratio RIR=1.37. The Rietveld refinement results were Rp = 0.0836, Rwp= 0.1092.