Determination of the Energy Flux of a Commercial Atmospheric-Pressure Plasma Jet for Different Process Gases and Distances Between Nozzle Outlet and Substrate Surface

2014 ◽  
Vol 54 (2) ◽  
pp. 155-161 ◽  
Author(s):  
M. Fröhlich ◽  
S. Bornholdt ◽  
C. Regula ◽  
J. Ihde ◽  
H. Kersten
2021 ◽  
Vol 8 (1) ◽  
Author(s):  
Thorben Kewitz ◽  
Christoph Regula ◽  
Maik Fröhlich ◽  
Jörg Ihde ◽  
Holger Kersten

AbstractThe influence of different nozzle head geometries and, therefore, the variation of the excitation and relaxation volume on the energy flux from an atmospheric pressure plasma jet to a surface have been investigated. Measurements have been performed by passive calorimetric probes under variation of the gas flow through the nozzle. The results show that the geometry of the nozzle head has a significant impact on the resulting energy flux. The relaxation volume affects the dependence of the energy flux on the gas flow. While there is no significant influence of the working gas flow on the energy flux without a relaxation volume, utilizing a relaxation volume leads to a decrease of the energy flux with increasing working gas flow. Within the analyzed parameter range, the energy flux reveals for both nozzle heads a linear dependency on the applied primary voltage.


Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 683
Author(s):  
Huiliang Jin ◽  
Caixue Tang ◽  
Haibo Li ◽  
Yuanhang Zhang ◽  
Yaguo Li

The continuous phase plate (CPP) is the vital diffractive optical element involved in laser beam shaping and smoothing in high-power laser systems. The high gradients, small spatial periods, and complex features make it difficult to achieve high accuracy when manufacturing such systems. A high-accuracy and high-efficiency surface topography manufacturing method for CPP is presented in this paper. The atmospheric pressure plasma jet (APPJ) system is presented and the removal characteristics are studied to obtain the optimal processing parameters. An optimized iterative algorithm based on the dwell point matrix and a fast Fourier transform (FFT) is proposed to improve the accuracy and efficiency in the dwell time calculation process. A 120 mm × 120 mm CPP surface topography with a 1326.2 nm peak-to-valley (PV) value is fabricated with four iteration steps after approximately 1.6 h of plasma processing. The residual figure error between the prescribed surface topography and plasma-processed surface topography is 28.08 nm root mean square (RMS). The far-field distribution characteristic of the plasma-fabricated surface is analyzed, for which the energy radius deviation is 11 μm at 90% encircled energy. The experimental results demonstrates the potential of the APPJ approach for the manufacturing of complex surface topographies.


2019 ◽  
Vol 675 ◽  
pp. 34-42 ◽  
Author(s):  
Md. Mokter Hossain ◽  
Quang Hung Trinh ◽  
Duc Ba Nguyen ◽  
M.S.P. Sudhakaran ◽  
Young Sun Mok

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