Two-dimensional modeling based on boltzmann transport equation for ion implantation
1985 ◽
Vol 68
(4)
◽
pp. 44-53
1983 ◽
Vol 4
(12)
◽
pp. 430-432
◽
1995 ◽
Vol 133
(2)
◽
pp. 133-139
1985 ◽
Vol 6
(7)
◽
pp. 323-325
◽
Keyword(s):
1998 ◽
Vol 37
(Part 1, No. 1)
◽
pp. 299-302
2015 ◽
Vol 17
(35)
◽
pp. 22872-22881
◽
1985 ◽
Vol 4
(4)
◽
pp. 362-368
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 37
(Part 2, No. 7A)
◽
pp. L781-L783