Polysilicon contact structures for silicon solar cells using atomic layer deposited oxides and nitrides as ultra‐thin dielectric interlayers

2021 ◽  
Author(s):  
Christian Reichel ◽  
Frank Feldmann ◽  
Armin Richter ◽  
Jan Benick ◽  
Martin Hermle ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer ◽  
Contact Structures ◽  
Silicon Solar Cells

scholarly journals Origin of the tunable carrier selectivity of atomic-layer-deposited TiOx nanolayers in crystalline silicon solar cells

2020 ◽  
Vol 209 ◽  
pp. 110461 ◽  
Author(s):  
Takuya Matsui ◽  
Martin Bivour ◽  
Paul F. Ndione ◽  
Ruy S. Bonilla ◽  
Martin Hermle
Keyword(s):  
Solar Cells ◽  
Crystalline Silicon ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Crystalline Silicon Solar Cells

scholarly journals Spatial Atomic Layer Deposition of Aluminum Oxide as a Passivating Hole Contact for Silicon Solar Cells

2020 ◽  
Vol 217 (18) ◽  
pp. 2000348
Author(s):  
Kortan Öğütman ◽  
Nafis Iqbal ◽  
Geoffrey Gregory ◽  
Mengjie Li ◽  
Michael Haslinger ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Layer Deposition

Excellent passivation and low reflectivity with atomic layer deposited bilayer coatings for n-type silicon solar cells

2014 ◽  
Vol 550 ◽  
pp. 541-544 ◽  
Author(s):  
Benjamin G. Lee ◽  
Shuo Li ◽  
Guillaume von Gastrow ◽  
Marko Yli-Koski ◽  
Hele Savin ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Type Silicon ◽  
Bilayer Coatings

scholarly journals Atomic Layer Deposition TiO2 Films and TiO2/SiNx Stacks Applied for Silicon Solar Cells

2016 ◽  
Vol 6 (8) ◽  
pp. 233 ◽  
Author(s):  
Zu-Po Yang ◽  
Hsyi-En Cheng ◽  
I-Hsuan Chang ◽  
Ing-Song Yu
Keyword(s):  
Solar Cells ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Tio2 Films ◽  
Layer Deposition

The Business of Fast ALD Equipment for Depositing Alumina Passivation Layers on Crystalline Silicon Solar Cells.

2011 ◽  
Vol 1353 ◽  
Author(s):  
Ad Vermeer ◽  
Roger Gortzen ◽  
P. Poodt ◽  
F. Roozeboom
Keyword(s):  
Solar Cells ◽  
Solar Cell ◽  
High Throughput ◽  
Crystalline Silicon ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Alumina Layer ◽  
Solar Cell Efficiency ◽  
Crystalline Silicon Solar Cells ◽  
Cell Efficiency

ABSTRACTAtomic Layer Deposition (ALD) is a gas phase deposition technique for depositing very high quality thin films with an unsurpassed conformality. The main drawback of ALD however is the very low deposition rate (~ 1 nm/min). Recently, record deposition rates for alumina of up to 1 nm/s were reached using spatial ALD, while maintaining the typical assets regarding film quality as obtained by conventional, slow ALD [1]. This allows for ALD at high throughput numbers.One interesting application is passivation of crystalline silicon solar cells. Applying a thin alumina layer is reported to increase solar cell efficiency and enables the use of thinner wafers, thus reducing the main cost factor [2]. In this paper we report on the latest progress made by SoLayTec that delivered a working prototype of a system realizing full area single sided deposition of alumina on 156 x 156 mm2, mono- and multi crystalline silicon wafers for solar cell applications. The alumina layers showed excellent passivation. Based on this concept, a high-throughput ALD deposition tool is being developed targeting throughput numbers of up to 3000 wafers/hr. Finally, we report on the process of commercializing this technology.

Atomic-layer-deposited aluminum oxide for the surface passivation of high-efficiency silicon solar cells

2008 ◽  
Author(s):  
Jan Schmidt ◽  
Agnes Merkle ◽  
B. Hoex ◽  
M.C.M. van de Sanden ◽  
W.M.M. Kessels ◽  
...  
Keyword(s):  
Solar Cells ◽  
Aluminum Oxide ◽  
High Efficiency ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Silicon Solar Cells

scholarly journals Atomic layer deposition of vanadium oxide films for crystalline silicon solar cells

2021 ◽  
Author(s):  
Eloi Ros Costals ◽  
Gerard Masmitjà ◽  
Estefania Rosa Almache ◽  
Benjamin andres Pusay ◽  
Kunal Tiwari ◽  
...  
Keyword(s):  
Solar Cells ◽  
Transition Metal Oxides ◽  
High Efficiency ◽  
Thermal Evaporation ◽  
Crystalline Silicon ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Deposition Technique ◽  
Crystalline Silicon Solar Cells ◽  
Layer Deposition

Transition Metal Oxides (TMOs) are promising materials to develop selective contacts on high-efficiency crystalline silicon solar cells. Nevertheless, the standard deposition technique used for TMOs is thermal evaporation, which could...

Atomic layer deposited ZnxNi1−xO: A thermally stable hole selective contact for silicon solar cells

2018 ◽  
Vol 113 (26) ◽  
pp. 262102 ◽  
Author(s):  
Tian Zhang ◽  
Md. Anower Hossain ◽  
Chang-Yeh Lee ◽  
Yahya Zakaria ◽  
Amir A. Abdallah ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Thermally Stable
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