Comparative Study of Films Deposited from HMDSO/O2 in Continuous Wave and Pulsed rf Discharges
2007 ◽
Vol 4
(S1)
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pp. S287-S293
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2020 ◽
Vol 9
(5)
◽
pp. 22
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Keyword(s):
2009 ◽
Vol 35
(3)
◽
pp. 397-400
◽
2018 ◽
Vol 26
(2)
◽
pp. 312-319
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 16
(2)
◽
pp. 217-225
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Keyword(s):