Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique

2010 ◽  
Vol 247 (7) ◽  
pp. 1653-1657 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Krzysztof Dybko ◽  
Grzegorz Luka ◽  
Lukasz Wachnicki ◽  
Bartlomiej S. Witkowski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Electrical And Optical Properties ◽  
Oxide Layers ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition

2008 ◽  
Vol 92 (2) ◽  
pp. 023502 ◽  
Author(s):  
N. Huby ◽  
S. Ferrari ◽  
E. Guziewicz ◽  
M. Godlewski ◽  
V. Osinniy
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Electrical Behavior ◽  
Oxide Layers ◽  
Layer Deposition

Dominant shallow donors in zinc oxide layers obtained by low-temperature atomic layer deposition: Electrical and optical investigations

2014 ◽  
Vol 65 ◽  
pp. 69-75 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Krzysztof Dybko ◽  
Grzegorz Luka ◽  
Elzbieta Guziewicz ◽  
Piotr Nowakowski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Layers ◽  
Shallow Donors ◽  
Layer Deposition

Analysis of scattering mechanisms in zinc oxide films grown by the atomic layer deposition technique

2015 ◽  
Vol 118 (3) ◽  
pp. 035706 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Krzysztof Dybko ◽  
Grzegorz Luka ◽  
Lukasz Wachnicki ◽  
Krzysztof Kopalko ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Oxide Films ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Scattering Mechanisms ◽  
Zinc Oxide Films ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Antimicrobial coatings grown by the atomic layer deposition technique

2015 ◽  
Author(s):  
Lukasz Wachnicki ◽  
Sylwia Gieraltowska ◽  
Bartlomiej S. Witkowski ◽  
Marek Godlewski ◽  
Michal M. Godlewski ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Antimicrobial Coatings ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique
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