A Study on The Effect of Base‐Reactant in Low‐Temperature Atomic Layer Deposition of Zinc Oxide

2021 ◽  
Author(s):  
Jin-Gyu Lee ◽  
Hong-Sub Lee
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals RBS/Channeling Analysis of Zinc Oxide Films Grown at Low Temperature by Atomic Layer Deposition

2013 ◽  
Vol 123 (5) ◽  
pp. 899-903 ◽  
Author(s):  
R. Ratajczak ◽  
A. Stonert ◽  
E. Guziewicz ◽  
S. Gierałtowska ◽  
T.A. Krajewski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Oxide Films ◽  
Atomic Layer ◽  
Zinc Oxide Films ◽  
Layer Deposition

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition

2008 ◽  
Vol 92 (2) ◽  
pp. 023502 ◽  
Author(s):  
N. Huby ◽  
S. Ferrari ◽  
E. Guziewicz ◽  
M. Godlewski ◽  
V. Osinniy
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Electrical Behavior ◽  
Oxide Layers ◽  
Layer Deposition

Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique

2010 ◽  
Vol 247 (7) ◽  
pp. 1653-1657 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Krzysztof Dybko ◽  
Grzegorz Luka ◽  
Lukasz Wachnicki ◽  
Bartlomiej S. Witkowski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Electrical And Optical Properties ◽  
Oxide Layers ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Dominant shallow donors in zinc oxide layers obtained by low-temperature atomic layer deposition: Electrical and optical investigations

2014 ◽  
Vol 65 ◽  
pp. 69-75 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Krzysztof Dybko ◽  
Grzegorz Luka ◽  
Elzbieta Guziewicz ◽  
Piotr Nowakowski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Layers ◽  
Shallow Donors ◽  
Layer Deposition

Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition

2013 ◽  
Vol 31 (1) ◽  
pp. 01A124 ◽  
Author(s):  
Tae-Hoon Jung ◽  
Jin-Seong Park ◽  
Dong-Ho Kim ◽  
Yongsoo Jeong ◽  
Sung-Gyu Park ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Plasma Treatment ◽  
Hydrogen Plasma ◽  
Atomic Layer ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document