scholarly journals Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas

2020 ◽  
Vol 6 ◽  
pp. 100088 ◽  
Author(s):  
Tai Nguyen ◽  
Noureddine Adjeroud ◽  
Mael Guennou ◽  
Jérôme Guillot ◽  
Yves Fleming ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Electrical And Optical Properties ◽  
Layer Deposition ◽  
Oxygen Gas

Broadband optical properties of aluminium zinc oxide thin films prepared by spatial atomic layer deposition

2018 ◽  
Vol 653 ◽  
pp. 267-273 ◽  
Author(s):  
Daniel B. Fullager ◽  
Glenn D. Boreman ◽  
Carolyn D. Ellinger ◽  
Tino Hofmann
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

2011 ◽  
Vol 4 (1) ◽  
pp. 268-272 ◽  
Author(s):  
A. Illiberi ◽  
F. Roozeboom ◽  
P. Poodt
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Transparent and conductive undoped zinc oxide thin films grown by atomic layer deposition

2010 ◽  
Vol 207 (7) ◽  
pp. 1568-1571 ◽  
Author(s):  
Grzegorz Luka ◽  
Tomasz Krajewski ◽  
Lukasz Wachnicki ◽  
Bartlomiej Witkowski ◽  
Elzbieta Lusakowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique

2010 ◽  
Vol 247 (7) ◽  
pp. 1653-1657 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Krzysztof Dybko ◽  
Grzegorz Luka ◽  
Lukasz Wachnicki ◽  
Bartlomiej S. Witkowski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Electrical And Optical Properties ◽  
Oxide Layers ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

scholarly journals Elucidating the growth mechanism of ZnO films by atomic layer deposition with oxygen gas via isotopic tracking

2021 ◽  
Vol 9 (12) ◽  
pp. 4307-4315
Author(s):  
Tai Nguyen ◽  
Nathalie Valle ◽  
Jérôme Guillot ◽  
Jérôme Bour ◽  
Noureddine Adjeroud ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Growth Mechanism ◽  
Growth Process ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Zno Films ◽  
Layer Deposition ◽  
Oxygen Gas

The growth process of zinc oxide (ZnO) thin films by atomic layer deposition (ALD) accompanied by the presence of oxygen gas pulsing is investigated by means of the isotopic tracking of oxygen 18O from the water precursor and oxygen 16O from the gas.

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