Kinetic Monte Carlo Simulation of the Growth of AlN Films by Metal Organic Chemical Vapor Deposition
2002 ◽
Vol 32
(1)
◽
pp. 297-319
◽
2008 ◽
Vol 43
(4)
◽
pp. 1036-1041
◽
2000 ◽
Vol 7
(1)
◽
pp. 12
2021 ◽
Vol 15
(6)
◽
pp. 2170024