Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition

2008 ◽  
Vol 5 (5) ◽  
pp. 1231-1234 ◽  
Author(s):  
G. Roeder ◽  
C. Manke ◽  
P. K. Baumann ◽  
S. Petersen ◽  
V. Yanev ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Preparation and characterization of thin films of alumina by metal-organic chemical vapor deposition

1988 ◽  
Vol 23 (1) ◽  
pp. 31-36 ◽  
Author(s):  
J. Fournier ◽  
W. DeSisto ◽  
R. Brusasco ◽  
M. Sosnowski ◽  
R. Kershaw ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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