Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition

2002 ◽  
Vol 41 (Part 1, No. 2A) ◽  
pp. 820-825 ◽  
Author(s):  
Kyoung-Won Kim ◽  
Nam-Soo Kim ◽  
Yeong-Seuk Kim ◽  
Il-Sang Choi ◽  
Ho-Joung Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Fabrication And Characterization ◽  
Organic Chemical Vapor Deposition ◽  
Liquid Delivery

Preparation and characterization of thin films of alumina by metal-organic chemical vapor deposition

1988 ◽  
Vol 23 (1) ◽  
pp. 31-36 ◽  
Author(s):  
J. Fournier ◽  
W. DeSisto ◽  
R. Brusasco ◽  
M. Sosnowski ◽  
R. Kershaw ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document