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Author(s):  
Neha Verma ◽  
Rob Delhez ◽  
Niek M. van der Pers ◽  
Frans D. Tichelaar ◽  
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1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
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1999 ◽  
Vol 86 (11) ◽  
pp. 6276-6281 ◽  
Author(s):  
J. V. Anguita ◽  
S. R. P. Silva ◽  
A. P. Burden ◽  
B. J. Sealy ◽  
S. Haq ◽  
...  

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2018 ◽  
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2009 ◽  
Vol 517 (16) ◽  
pp. 4694-4697 ◽  
Author(s):  
T. Wagner ◽  
J. Orava ◽  
J. Prikryl ◽  
T. Kohoutek ◽  
M. Bartos ◽  
...  

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