Surface acoustic wave relative humidity sensor based on sputtering SiO
2
film
Keyword(s):
2010 ◽
Vol 13
(5)
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pp. J65
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2010 ◽
Vol 147
(2)
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pp. 381-384
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2009 ◽
Vol 21
(7)
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pp. 441-443
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Keyword(s):
1993 ◽
Vol 16
(1-3)
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pp. 288-292
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2012 ◽
Vol 23
(8)
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pp. 085103
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Keyword(s):
2017 ◽
Vol 246
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pp. 809-818
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Keyword(s):
2016 ◽
Vol 34
(19)
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pp. 4511-4515
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2014 ◽
Vol 20
(4)
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pp. 314-319
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