Small mass measurements for tuning fork-based atomic force microscope cantilever spring constant calibration

MEMS and Nanotechnology, Volume 2 - Conference Proceedings of the Society for Experimental Mechanics Series ◽

10.1007/978-1-4419-8825-6_8 ◽

2011 ◽

pp. 49-56 ◽

Author(s):

Gordon A. Shaw ◽

Jon R. Pratt ◽

Zeina J. Jabbour

Keyword(s):

Atomic Force Microscope ◽

Tuning Fork ◽

Spring Constant ◽

Mass Measurements ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Improved methods and uncertainty analysis in the calibration of the spring constant of an atomic force microscope cantilever using static experimental methods

Measurement Science and Technology ◽

10.1088/0957-0233/20/12/125501 ◽

2009 ◽

Vol 20 (12) ◽

pp. 125501 ◽

Author(s):

Charles A Clifford ◽

Martin P Seah

Keyword(s):

Uncertainty Analysis ◽

Atomic Force Microscope ◽

Experimental Methods ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Improved Methods ◽

Force Microscope Cantilever

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Atomic force microscope cantilever spring constant evaluation for higher mode oscillations: A kinetostatic method

Review of Scientific Instruments ◽

10.1063/1.2839019 ◽

2008 ◽

Vol 79 (2) ◽

pp. 025102 ◽

Author(s):

Yakov M. Tseytlin

Keyword(s):

Atomic Force Microscope ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Erratum: “Atomic force microscope cantilever spring constant evaluation for higher mode oscillations: A kinetostatic method” [Rev. Sci. Instrum. 79, 025102 (2008)]

Review of Scientific Instruments ◽

10.1063/1.2937206 ◽

2008 ◽

Vol 79 (5) ◽

pp. 059901 ◽

Author(s):

Yakov M. Tseytlin

Keyword(s):

Atomic Force Microscope ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Tuning-Fork Atomic Force Microscope Cantilever Encoder and Applications for Displacement and In-Plane Rotation Angle Measurement

Procedia Engineering ◽

10.1016/j.proeng.2011.12.138 ◽

2011 ◽

Vol 25 ◽

pp. 555-558 ◽

Author(s):

Chen Xiaomei ◽

Koenders Ludger ◽

Wolff Helmut ◽

Härtig Frank

Keyword(s):

Atomic Force Microscope ◽

Tuning Fork ◽

Rotation Angle ◽

Angle Measurement ◽

Plane Rotation ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Precise atomic force microscope cantilever spring constant calibration using a reference cantilever array

Review of Scientific Instruments ◽

10.1063/1.2764372 ◽

2007 ◽

Vol 78 (8) ◽

pp. 086101 ◽

Author(s):

Richard S. Gates ◽

Mark G. Reitsma

Keyword(s):

Atomic Force Microscope ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Cantilever Array ◽

Force Microscope Cantilever

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Torsional spring constant obtained for an atomic force microscope cantilever

Applied Physics Letters ◽

10.1063/1.1667000 ◽

2004 ◽

Vol 84 (10) ◽

pp. 1795-1797 ◽

Author(s):

Sangmin Jeon ◽

Yehuda Braiman ◽

Thomas Thundat

Keyword(s):

Atomic Force Microscope ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Torsional Spring ◽

Force Microscope Cantilever

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A novel method and system for calibrating the spring constant of atomic force microscope cantilever based on electromagnetic actuation

Review of Scientific Instruments ◽

10.1063/1.5051401 ◽

2018 ◽

Vol 89 (12) ◽

pp. 125119

Author(s):

Yanling Tian ◽

Chongkai Zhou ◽

Fujun Wang ◽

Jinyi Zhang ◽

Zhiyong Guo ◽

...

Keyword(s):

Atomic Force Microscope ◽

Spring Constant ◽

Electromagnetic Actuation ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Novel Method ◽

Force Microscope Cantilever

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Effects of anisotropic material property on the spring constant and the resonant frequency of atomic force microscope cantilever

Review of Scientific Instruments ◽

10.1063/1.3115212 ◽

2009 ◽

Vol 80 (4) ◽

pp. 043705 ◽

Author(s):

Meng-Kao Yeh ◽

Nyan-Hwa Tai ◽

Bo-Yi Chen

Keyword(s):

Resonant Frequency ◽

Atomic Force Microscope ◽

Material Property ◽

Anisotropic Material ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Influence of atomic force microscope cantilever tilt and induced torque on force measurements

Journal of Applied Physics ◽

10.1063/1.2885734 ◽

2008 ◽

Vol 103 (6) ◽

pp. 064513 ◽

Author(s):

Scott A. Edwards ◽

William A. Ducker ◽

John E. Sader

Keyword(s):

Atomic Force Microscope ◽

Force Measurements ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures

Applied Physics Letters ◽

10.1063/1.2786881 ◽

2007 ◽

Vol 91 (12) ◽

pp. 121912 ◽

Author(s):

Gaoliang Dai ◽

Helmut Wolff ◽

Hans-Ulrich Danzebrink

Keyword(s):

Atomic Force Microscope ◽

Three Dimensional ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Measuring Probe ◽

Dimensional Measurements ◽

Force Microscope Cantilever

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