Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures
2011 ◽
Vol 11
(11)
◽
pp. 2664-2670
◽
2009 ◽
Vol 20
(12)
◽
pp. 125501
◽
2012 ◽
Vol 51
(3R)
◽
pp. 035202
◽